Nano Fabrications

  • E-beam writer + scanning electron microscope (<30 nm)
  • Transfer stage for assemblying Van der Waals layered materials
  • Atomic Force Microscope
  • Multipurpose E-beam evaporator with loadlock (E-beam/Sputter/Ar Etcher)
  • E-beam evaporator with loadlock (E-beam/Ar Etcher)
  • Reactive Ion Etcher
  • Atomic Layer Deposition
  • Thermal annealer
  • Glove Box (Transfer stages, Hot plates, etc.)
  • Cleanroom (Transfer stages, Optical microscopes, Spin-coater, Hot plates, etc.)
  • Chemical fume hood
  • Thermal evaporator
  • Gold plasma coater

Low Temperature Measurement System

  • Leiden dilution frigerator (10 mK, 15.5 T) + Helium re-liquefier
  • Oxford dilution frigerator (Kelvinox, 150 mK)
  • Oxford Heliox He3 frigerator (300 mK, 10 T) + Helium re-liquefier
  • Bluefors cryogen-free dilution refrigerator (10 mK, 14 T)
  • Dip stick probes (4.2 K)
  • Helium liquefying plant + purifier

GHLee Lab