Nano Fabrications

Low Temperature Measurement System

• E-beam writer + scanning electron microscope (<30 nm)
• Atomic Force Microscope
• Multipurpose E-beam evaporator with loadlock (E-beam/Sputter/Ar Etcher)
• E-beam evaporator with loadlock (E-beam/Ar Etcher)
• Reactive Ion Etchers
• Atomic Layer Deposition
• Thermal annealer
• Glove Boxes (Transfer stages, Optical microscopes, Hot plates, etc.)
• Optical microscopes
• Transfer stage for assembling Van der Waals layered materials
• Chemical fume hood (Spin-coater, Hot plates, etc.)

• Oxford TESLATRON (1.5 K / 300 mK, 10 T)
• Oxford PROTEOX cryogen-free dilution refrigerator (10 mK, 6/1/1 T)
• Bluefors cryogen-free dilution refrigerator (10 mK, 14 T)
• Bluefors cryogen-free dilution refrigerator for RF measurement (10 mK)
• Bluefors cryogen-free dilution refrigerator for RF measurement (30 mK)
• Dip stick probes (4.2 K)