Nano Fabrications
- E-beam writer + scanning electron microscope (<30 nm)
- Atomic Force Microscope
- Multipurpose E-beam evaporator with loadlock (E-beam/Sputter/Ar Etcher)
- E-beam evaporator with loadlock (E-beam/Ar Etcher)
- Reactive Ion Etchers
- Atomic Layer Deposition
- Thermal annealer
- Glove Boxes (Transfer stages, Optical microscopes, Hot plates, etc.)
- Optical microscopes
- Transfer stage for assemblying Van der Waals layered materials
- Chemical fume hood (Spin-coater, Hot plates, etc.)
Low Temperature Measurement System
- Oxford TESLATRPON (1.5 K / 300 mK, 10 T)
- Oxford PROTEOX cryogen-free dilution refrigerator (10 mK, 6/1/1 T)
- Bluefors cryogen-free dilution refrigerator (10 mK, 14 T)
- Bluefors cryogen-free dilution refrigerator for RF measurement (10 mK,)
- Dip stick probes (4.2 K)
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Transfer stage for assemblying Van der Waals layered materials
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Scanning Electron Microscope (SEM)
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Reactive Ion Etcher(RIE) -
Atomic Force Microscope (AFM)
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Glovebox -
Atomic Layer Deposition (ALD) -
Thermal annealer
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Multipurpose evaporator with loadlock (E-beam/Sputter/Ar Etcher) -
E-beam evaporator with loadlock (E-beam/Ar Etcher)
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Oxford TESLATRPON cryogen-free refrigerator (1.5 K / 300 mK, 10 T) -
Oxford PROTEOX cryogen-free dilution refrigerator (10 mK, 6/1/1 T)
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Bluefors cryogen-free dilution refrigerator (10 mK, 14 T) -
Bluefors cryogen-free dilution refrigerator for RF measurement (10 mK)
