Nano Fabrications
- E-beam writer + scanning electron microscope (<30 nm)
- Transfer stage for assemblying Van der Waals layered materials
- Atomic Force Microscope
- Multipurpose E-beam evaporator with loadlock (E-beam/Sputter/Ar Etcher)
- E-beam evaporator with loadlock (E-beam/Ar Etcher)
- Reactive Ion Etcher
- Atomic Layer Deposition
- Thermal annealer
- Glove Box (Transfer stages, Hot plates, etc.)
- Cleanroom (Transfer stages, Optical microscopes, Spin-coater, Hot plates, etc.)
- Chemical fume hood
- Thermal evaporator
- Gold plasma coater
Low Temperature Measurement System
- Leiden dilution frigerator (10 mK, 15.5 T) + Helium re-liquefier
- Oxford dilution frigerator (Kelvinox, 150 mK)
- Oxford Heliox He3 frigerator (300 mK, 10 T) + Helium re-liquefier
- Bluefors cryogen-free dilution refrigerator (10 mK, 14 T)
- Dip stick probes (4.2 K)
- Helium liquefying plant + purifier
-
Transfer Stage
-
Scanning Electron Microscope
(SEM)
-
Reactive Ion Etcher(RIE)
-
Atomic Force Microscope(AFM) -
Cleanroom
-
Multipurpose evaporator with loadlock
(E-beam/Sputter/Ar Etcher) -
E-beam evaporator with loadlock
(E-beam/Ar Etcher)
-
Leiden dilution frigerator
(10 mK) -
Oxford Heliox He3 frigerator
(300 mK)
-
Oxford dilution frigerator
(Kelvinox, 150 mK)